Softwall cleanroom - Semiconductor application - UV

 

Modular cleanroom semiconductor application - Mask Aligner

 

This UV compatible softwall cleanroom has been utilized to transform an existing uncontrolled office / lab environment into a high class cleanroom, suitable to house a piloit line semiconductor proces (step). The end user choose the economic approach: only the most critical process(es) will be performed locally inside this small hi quality portable and very flexible cleanroom. The softwall cleanroom houses a mask aligner being utilized for photolithography processes. Because of their UV sensitive process, the end user demanded to have UV light with a certain bandwith blocked from the cleanroom to a certain degree. To achieve this, ProCleanroom utilized UV blocking softwall strips, blinded ceiling and special UV compatible (the typical) yellow lighting on the inside. Supplied with braked castors for maximum portability.

Modular cleanroom features:

  • ISO class 5 (ISO 14644-part 1)
  • 340 air changes per hour - 2 off HEPA fan filters
  • 1.8 x 1.8 x 2.1 m (l x w x int. h)
  • Robust powder coated mild steel frame
  • 4 off legs with braked castors
  • UV compatible softwall strips all around
  • UV compatible internal lighting
  • blinded ceiling
  • delivered in 2 weeks after receipt of order
  • installed and validated onsite within 1 day